Intel Makes an Ultra-Tiny Chip
By JOHN MARKOFF

Computer researchers have fashioned infinitesimally tiny electronic
switches using conventional chipmaking equipment, demonstrating
that the semiconductor industry will be able to continue shrinking
its basic building blocks at a torrid pace at least until the end
of this decade.

 At a technical conference being held this weekend in Kyoto, Japan,
a scientist for the Intel Corporation reported that the company had
successfully made a handful of silicon transistors no more than 70
to 80 atoms wide and 3 atoms thick. They are capable of switching
on and off 1.5 trillion times a second, making them the world's
fastest silicon transistor.

 Although the Lilliputian switches do not represent the smallest
experimental transistors yet invented, they are being hailed by the
industry as a watershed because they were made using standard
commercial techniques and the same materials used in today's
microprocessors and memory chips.

 The achievement indicates that researchers have once again found a
way around technical barriers that might have slowed or stopped the
phenomenal four-decade march that has led to the speed and power of
today's computers.

 "This is a very good piece of technical work," said Hon-Sum Philip
Wong, an I.B.M. research scientist who presented a similar paper in
Japan this weekend focusing on related technical problems in
building transistors three generations in the future.

 Although semiconductor engineers can now predict with great
accuracy the amount of computing power that the transistor advance
will bring with it by 2007, computer scientists cautioned that
speculating about labor-saving applications or dazzling
technological consequences can be more risky.

 While the semiconductor manufacturing process underlying the
modern microchip continues to improve steadily, specific new
applications are frequently unpredictable. Some of the most
prominent advances of recent years ó for example the electronic
wristwatch, the personal computer and the Internet ó all largely
came as surprises to experts.

 The research will make make possible computer processor chips with
as many as one billion transistors and 20 gigahertz speeds. That is
more than 23 times the number of transistors used in Intel's
current state-of-the-art Pentium 4 microprocessor, which has 42
million transistors and is capable of executing 1.7 billion
instructions a second.

 It will also make possible a generation of fingernail-sized memory
chips that can each store four billion bits of data ó more than 333
copies of "Moby Dick."

 Industry researchers said that shrinking the transistor size was a
technical tour de force.

 "It proves that Intel is a technical heavyweight," said G. Dan
Hutcheson, president of VLSI Research, a semiconductor industry
research firm based in San Jose, Calif. "What Intel does so well is
take a technology that is not meant to be extendable and pushing it
past its limits, making computing incredibly cost-effective."

 Moreover, the new chips will consume less than one volt of
electricity ó perhaps less than half of today's Intel
microprocessors ó making it likely that within half a decade the
world's fastest processors will be portable and perhaps even hand-
held.

 Significantly, in an era when vast farms of Internet and World
Wide Web servers are being blamed for a share of the nation's
electrical power crunch, the Intel scientists reported that the
power consumption of each new generation of chips is shrinking more
quickly than the computer power is increasing.

 Indeed, the dwindling power requirement of the Intel transistors
represents one of the fortunate paradoxes of silicon-based
computing: these transistors are able to switch on and off more
than three times faster than today's microprocessors while
consuming only slightly more than half as much electricity.

 The Intel technical paper, which was presented this weekend at the
Silicon Nano Electronics Workshop in Japan, comes as good news for
an industry that in the last two years has been experiencing
self-doubt about the longevity of its guiding principle, known as
Moore's Law.

 First noted by the Intel pioneer and cofounder Gordon E. Moore in
1965, the rule has held that the number of transistors that can be
etched on a single chip of silicon doubles on average every 18
months.

 But engineers and physicists note there is nothing technically or
physically inevitable in the continued shrinking of the fundamental
size of electronic circuitry. Indeed, as long ago as 1993, Dr.
Moore himself publicly voiced his doubts about the permanence of
the progression that received his name. In a speech given in
Silicon Valley that year, he suggested that a process known as 0.25
micron might be the point at which the industry ran into
fundamental physical limits. A micron is a millionth of a meter.

 Nevertheless, chip makers blew past the 0.25-micron size two
generations of chips ago ó roughly four years ó and now use exotic
optical techniques to manufacture the most advanced processors and
memory chips, which are based on transistors with 0.13-micron
technology.

 Now Intel scientists are saying that they can see their way at
least three more generations into the future, to transistors with a
0.045-micron technology ó less than one-fifth the size limit that
Dr. Moore speculated about.

 "Everyone who predicts the end of Moore's Law has always been
wrong," said Gerald Marcyk, Intel's director of components research
technology manufacturing group in Hillsboro, Ore.

 The new results are a dramatic contrast to a pessimistic article
written by another Intel researcher two years ago in the journal
Science.

 The Intel scientist, Paul A. Packan, wrote that it was not clear
whether the most common type of silicon transistor could be scaled
down beyond the 0.13-micron generation of chips that began to
appear last year, because semiconductor engineers had not found
ways around basic physical limits.

 Now that those potential physical limits have been surmounted, the
researchers acknowledged they are in a realm where the switches are
so small that arcane physical effects such as the quantum behavior
of electrons become a factor, making chip-building as much an art
as a science.

 The Intel scientists performed some "heroic efforts" to make a
handful of transistors work, Dr. Marcyk said, adding that the
specific methods used were Intel manufacturing trade secrets.

 One of the principal challenges in creating these kinds of
switches is that their smallest dimensions are much smaller than
the wavelengths of light generated by the machines that etch
patterns on silicon wafers.

 In conventional lithography, a mask is used with transparent areas
and opaque areas, like a photographic negative. However, the light
passing through the transparent areas bends slightly, leaving a
slightly blurry image. As circuits shrink below the width of a
lightwave, this becomes a profound problem.

 However, engineers have found a way to turn that manufacturing
defect into a remarkably precise tool through a process called
"phase shifting," which makes use of interfering patterns of light
to create ultrafine circuit lines.

 The semiconductor industry's technical road map has generally
forecast that integrated circuits will stay on their doubling path
until 2014. But doubters have continued to emerge, suggesting
either that there will be insurmountable technical obstacles or
that at some point the cost of each new generation of semiconductor
factory will soar astronomically.

 The Intel researchers said they had been faced with another
challenge besides building ever tinier chips. Dr. Marcyk said that
each time he presented his results to Andrew S. Grove, Intel's
chairman and co-founder, Dr. Grove insisted, "I want you to show me
the limit."

 "I have to tell him, `Andy, I haven't found the limit yet,' " he
said.

Copyright 2001 The New York Times Company
 

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